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发明名称
NEGATIVE ION IMPLANTATION METHOD
摘要
申请公布号
JPH05314945(A)
申请公布日期
1993.11.26
申请号
JP19920146884
申请日期
1992.05.13
申请人
NISSIN HIGH VOLTAGE CO LTD
发明人
IWAMOTO EIJI
分类号
H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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