| 摘要 |
PURPOSE:To secure a contour form measuring device that can measure the contour form of a measured work so accurately in a simple system. CONSTITUTION:A scale surface 16b is formed in the underside of a work table 16. ACCD camera 34 of low resolution, photographing the whole body of this work table 16 is installed there. Another CCD camera 36 of high resolution, photographing a part of a projected image 53 is installed in a mobile table 28. Then, a key mark 20A is selected out of a photographed image 50 taken by the CCD camera 36 by a controller 48, and a relative coordinate at a contour measuring point used with this key mark 20A as the reference is calculated. A scale coordinate in the work table 16 of the key mark 20A is calculated out of the photographed image 53 of the whole work table 16 photographed by the CCD camera 34, and on the basis of the scale coordinate of the key mark 20A and the relative coordinate of the calculated measuring point, the picture element resolution of the CCD camera 36 is applied to the relative coordinate, and thereby this relative coordinate is converted into the scale coordinate at a hare position 0 of the work table 16. Plural converted scale coordinates are coupled together, through which such sequence control as forming the contour form of a measured work 18 is carried out. |
