SILICON SUBSTRATE AND MANUFACTURE THEREOF,申请号JP19920090709-传众专利搜索

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发明名称	SILICON SUBSTRATE AND MANUFACTURE THEREOF
摘要
申请公布号	JPH05291097(A)	申请公布日期	1993.11.05
申请号	JP19920090709	申请日期	1992.04.10
申请人	NIPPON STEEL CORP	发明人	TSUMORI YASUO
分类号	C30B29/06;H01L21/02;H01L21/322;(IPC1-7):H01L21/02	主分类号	C30B29/06
代理机构		代理人
主权项
地址

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