DEPOSITION OF TUNGSTEN,申请号CA19922067565-传众专利搜索

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发明名称	DEPOSITION OF TUNGSTEN
摘要
申请公布号	CA2067565(A1)	申请公布日期	1993.10.30
申请号	CA19922067565	申请日期	1992.04.29
申请人	EMESH, ISMAIL T.	发明人	EMESH, ISMAIL T.
分类号	C23C16/02;C23C16/14;H01L21/768;(IPC1-7):H01L21/285;C23C16/08	主分类号	C23C16/02
代理机构		代理人
主权项
地址

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