发明名称 LIGHT INTENSITY DISTRIBUTION MEASURING DEVICE FOR PULSED LASER BEAM
摘要 PURPOSE:To automatically measure the light intensity distribution for each oscillation of a pulsed laser even when the pulse width, etc., oscillating condition is changed by controlling the exposure by a readout signal based on a trigger signal having calculated and set delay time. CONSTITUTION:A pulsed laser beam 1 having the pulse width tau1, period TFP from a laser oscillator 20 is reduced by a beam sampler 2A, etc., detected by a CCD image picking-up device 8, and data on the light-intensity distribution of the beam are displayed 10A. On the other hand, a pulsed beam signal 11 based on a sampled light taken out from the sampler 2A, and delay time TD calculated and set by a calculating device 15 according to N.TFP+ TEXP-TVD-tau1<=TD<=N.TFP-TVD (TEXP is exposure time, TVD is readout signal period, N is whole number meeting N>TVD/TFP) are inputted to a trigger signal generator 14. The generator 14 outputs a trigger signal 13 having the pulse width which corresponds to the delay time TD. With the device 8, exposure is made for set up time TEXP by a shutter pulse 17 based on a vertical synchronizing signal synchronized with the last transition of the trigger signal 13 inputted from a camera controller 9.
申请公布号 JPH05281038(A) 申请公布日期 1993.10.29
申请号 JP19920074180 申请日期 1992.03.30
申请人 发明人
分类号 B23K26/00;G01J1/42;G01J1/44;G01J11/00 主分类号 B23K26/00
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