GATE VALVE SWITCH OF SEMICONDUCTOR CARRIER,申请号JP19920108906-传众专利搜索

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发明名称	GATE VALVE SWITCH OF SEMICONDUCTOR CARRIER
摘要
申请公布号	JPH05283504(A)	申请公布日期	1993.10.29
申请号	JP19920108906	申请日期	1992.03.31
申请人		发明人
分类号	B65G49/00;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68	主分类号	B65G49/00
代理机构		代理人
主权项
地址

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