| 发明名称 |
Multilayer film reflector for soft X-rays. |
| 摘要 |
<p>On a substrate (1) materials of different X-ray refractive indexes, for example, silicon (Si) and molybdenum (Mo), are alternately deposited to form a multilayer film composed of silicon and molybdenum layers (2, 3), and a hydrogenated layer (4) is formed in each interface of the layers. <IMAGE></p> |
| 申请公布号 |
EP0567022(A1) |
申请公布日期 |
1993.10.27 |
| 申请号 |
EP19930106261 |
申请日期 |
1993.04.16 |
| 申请人 |
JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED |
发明人 |
ITOH, KAZUHIKO;KATAOKA, IZUMI |
| 分类号 |
G21K1/06;(IPC1-7):G21K1/06 |
主分类号 |
G21K1/06 |
| 代理机构 |
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代理人 |
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| 地址 |
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