| 摘要 |
<p>PURPOSE:To obtain a resistance element which is prevented virtually from sticking of an extraneous substance such as dust in a fluid and of which the precision in responsiveness and an output characteristic is improved. CONSTITUTION:In regard to a resistance element 20 employed for a thermal type flow sensor and the like, the outer surface of a glass layer 16 protecting a ceramic pipe 10 and a metal thin film 11 is covered with a boron nitride layer 17. Thereby dust, oil and others are prevented virtually from sticking on the outer surface of the resistance element 20 and the thermal conductivity and the responsiveness of the resistance element 20 are improved.</p> |
