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发明名称
(B2) ;TOEIROKOSOCHI
摘要
申请公布号
JPH05275315(A)
申请公布日期
1993.10.22
申请号
JP19920204989
申请日期
1992.07.31
申请人
发明人
分类号
G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
G03F7/20
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代理人
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