摘要 |
<p>PURPOSE:To restrain light rays which can not be screened by a light shading film so as to lessen an OFF-state current generated in a semiconductor layer. CONSTITUTION:A semiconductor protective film 18 is formed thinner than usual at its interface with an undoped a-Si layer 17, and consequently an electron storage band is less bent. In result, an OFF-state photocurrent can be decreased even if the same amount of light enters.</p> |