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发明名称
摘要
申请公布号
JPS55154548(U)
申请公布日期
1980.11.07
申请号
JP19790053431U
申请日期
1979.04.23
申请人
发明人
分类号
H01L21/30;G03F1/00;G03F1/54;G03F7/42;H01L21/027
主分类号
H01L21/30
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代理人
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