发明名称 SEMICONDUCTOR MANUFACTURE DEVICE
摘要 PURPOSE:To make it possible to drop copper paste to a die stage at a specified position virtually without any adjustment by enabling a guide means to hold a constant and fixed positional relation with a holder with which a guided means is fixed. CONSTITUTION:A bearing 32, a holder 34 and a guided means 35 are lowered with a lift piston 31a so that a sphere 35a of the guided means 35 may be guided into a hemispheric guide hole 36a installed on the surface of the guide means. If there is no agreement between a virtual straight line which passes through the center of the sphere 35a and extends in a vertical direction when the sphere 36a is guided to the guide hole 36a, a virtual straight line which passes through the center of the sphere 35a and extends in a vertical direction when it is guided to the guide hole 36a, and a virtual straight line which passes through the guide hole 36a and extends in a vertical direction, the holder 34 is forced to move by way of an arm 35b until the two virtual straight lines agree to each other although the sphere 35a is being guided to the guided hole 36a, thereby holding a constant and fixed positional relation between the holder 34 and the guide means 36.
申请公布号 JPH05267366(A) 申请公布日期 1993.10.15
申请号 JP19920063528 申请日期 1992.03.19
申请人 发明人
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
代理机构 代理人
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