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发明名称
PATTERN AREA RATIO MEASURING APPARATUS
摘要
申请公布号
EP0399562(B1)
申请公布日期
1993.10.13
申请号
EP19900110015
申请日期
1990.05.26
申请人
KOMORI CORPORATION
发明人
SHIZUYA, FUMIO
分类号
B41F31/02;G01J1/44;G01N21/47;G01B11/28
主分类号
B41F31/02
代理机构
代理人
主权项
地址
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