| 摘要 |
PURPOSE:To obtain the process for production capable of producing the optical waveguides which are small in layer thickness within a core layer and clad layer and are small in the propagation loss of light power. CONSTITUTION:A dopant is doped in first and second clad layers 31, 34 and a core layer 32 so as to minimize the difference between the coefft. of thermal expansion of the first and second clad layers 31, 34 and the coefft. of thermal expansion of the core layer 32 in the process for production of the optical waveguides having a stage for forming the first clad layer 31 and the core layer 32 on a substrate 30, a stage for patterning the core layer 32 to desired patterns 33 and a stage for forming the second clad layer 34 on the core layer 32. |
