METHOD FOR FORMING OXIDE THIN FILM AND DEVICE THEREFOR,申请号JP19920053382-传众专利搜索

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发明名称	METHOD FOR FORMING OXIDE THIN FILM AND DEVICE THEREFOR
摘要
申请公布号	JPH05255838(A)	申请公布日期	1993.10.05
申请号	JP19920053382	申请日期	1992.03.12
申请人		发明人
分类号	C23C14/24;(IPC1-7):C23C14/24	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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