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发明名称
APPARATUS FOR INSPECTING EXTERNAL APPEARANCE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH05249044(A)
申请公布日期
1993.09.28
申请号
JP19920051190
申请日期
1992.03.10
申请人
NEC CORP
发明人
KIKUCHI MASAHARU
分类号
H01L21/66;G01N21/88;G01N21/956;(IPC1-7):G01N21/88
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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