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发明名称
CRYSTAL GROWTH METHOD OF SEMICONDUCTOR
摘要
申请公布号
JPH05251345(A)
申请公布日期
1993.09.28
申请号
JP19920084925
申请日期
1992.03.06
申请人
NEC CORP
发明人
GOMYO AKIKO
分类号
C30B23/08;C30B25/02;C30B29/40;C30B29/68;H01L21/203;(IPC1-7):H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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