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发明名称
TREATMENT APPARATUS
摘要
申请公布号
JPH05251327(A)
申请公布日期
1993.09.28
申请号
JP19920083217
申请日期
1992.03.05
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
KIMURA YOSHIO
分类号
B05C11/08;G03F7/16;H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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