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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH05243185(A)
申请公布日期
1993.09.21
申请号
JP19910055879
申请日期
1991.02.27
申请人
SONY CORP
发明人
SATO JUNICHI
分类号
C23C14/22;C23F4/00;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/302
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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