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发明名称
VAPOR GROWTH DEVICE AND METHOD OF GROWING EPITAXIAL FILM
摘要
申请公布号
JPH05243161(A)
申请公布日期
1993.09.21
申请号
JP19920013561
申请日期
1992.01.29
申请人
NEC CORP
发明人
SHISHIGUCHI SEIICHI
分类号
C30B25/14;H01L21/205;(IPC1-7):H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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