发明名称 Concentrator funnel for vacuum line particle monitors
摘要 A converging funnel is placed in an exhaust line to direct substantially all the gas flow in the exhaust line to the sensing laser beam of a particle sensor, thereby preventing deposition of species carried by the gas from depositing on the particle sensor. By concentrating substantially all gas flow through the laser beam, the particle count rate is increased because substantially all particles carried by the exhaust gas is channeled through the laser beam. Further, the particle sensor is also prevented from adverse heating effects of the exhaust gas. In one embodiment, the converging funnel is mounted to the interior wall of the exhaust line by a centering ring.
申请公布号 US5247188(A) 申请公布日期 1993.09.21
申请号 US19920824663 申请日期 1992.01.23
申请人 HIGH YIELD TECHNOLOGY 发明人 BORDEN, PETER G.
分类号 G01N1/22;G01N15/06;G01N21/53 主分类号 G01N1/22
代理机构 代理人
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