| 摘要 |
<p>PURPOSE:To obtain a vacuum joint structure, which can perform coupling and separation of many cooling pipes quickly and highly accurately. CONSTITUTION:A structure 6, which is arranged in a vacuum container 1 and requires replacement, many cooling pipes 11, which cool the structure 6 and communicate with the inside and the outside of the vacuum container 1, and connecting flanges 13 which bundle many cooling pipes 11 as a unitary body and form a pair, are provided. The structure is constituted so that the cooling pipes 11 can be coupled and separated with the connecting flanges 13.</p> |
