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发明名称
摘要
申请公布号	JPH0566989(U)	申请公布日期	1993.09.03
申请号	JP19920003762U	申请日期	1992.02.04
申请人		发明人
分类号	G01R31/26;G01R31/28;H01L21/66;H01L21/68;H01L21/683;(IPC1-7):H01L21/68	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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