HERSTELLUNG VON ALUMINIUMNITRIDPULVER DURCH KARBOREDUKTIVE NITRIDIERUNG.,申请号DE19896007868-传众专利搜索

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发明名称	HERSTELLUNG VON ALUMINIUMNITRIDPULVER DURCH KARBOREDUKTIVE NITRIDIERUNG.
摘要
申请公布号	DE68907868(D1)	申请公布日期	1993.09.02
申请号	DE19896007868	申请日期	1989.10.05
申请人	SUMITOMO CHEMICAL CO., LTD., OSAKA, JP	发明人	NAKANO, KAZUHIKO, TSUKUBA-SHI IBARAKI, JP;MURASE, MITSUTOSHI, NIIHAMA-SHI EHIME, JP;MATSUDA, NORIO, TSUKUBA-SHI IBARAKI, JP;MURAKAMI, HIDEAKI, NIIHAMA-SHI EHIME, JP
分类号	C01B21/072;H01L21/48;(IPC1-7):C01B21/072;C04B35/58	主分类号	C01B21/072
代理机构		代理人
主权项
地址

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