发明名称 |
Energy resolved emission microscopy system and method. |
摘要 |
<p>Emission microscopy software for analyzing an integrated circuit includes one or more subroutines for determining the location of an emission site based upon a powered down background image and a powered up integrated circuit image; one or more subroutines for controlling an optical dispersing apparatus and a CCD camera shutter set on the emission site to obtain photon counts therein; one or more subroutines for correcting data obtained based upon equipment sensitivities; and one or more subroutines for manipulating data relating to light intensity, wavelength, and energy, as well as relating to volt ages applied to the integrated circuit.</p> |
申请公布号 |
EP0558177(A1) |
申请公布日期 |
1993.09.01 |
申请号 |
EP19930300290 |
申请日期 |
1993.01.18 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
BRUCE, VICTORIA J. |
分类号 |
G01R31/302;G01R31/308;G01R31/311;H01L21/66 |
主分类号 |
G01R31/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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