| 摘要 |
<p>PURPOSE:To enable the measurement of the deformation of a body to be measured with high measuring accuracy, even if the deformation thereof reaches the unit of millimeter, by successively storing the speckle pattern images into an image memory, and then by taking an appropriate difference thereof. CONSTITUTION:The laser beams from a laser beam source 2 are subjected to optical path change by a mirror 3, and then are amplitude-splitted by a semitransparent mirror 6. One part out of them illuminates a body 8 to be measured, and then is scatteredly reflected to become body light and is made incident on an image pickup device 11. Another part illuminates a reference body 7, and then is scatteredly reflected to become reference light and is reflected by the semitransparent mirror, and is superposed on the body light to form a speckle pattern image and is made incident on the image pickup device 11. Only the speckle pattern images of a series of deformation of the body 8 are successively stored into a large-capacity image memory 12 in real time, and then by taking the difference between appropriate two sheets of images, the deformation of the measuring body at time intervals at the time two sheets of speckle images are formed is obtained. By successively repeating this procedure, and by adding the respective deformations, even a large deformation can be measured.</p> |
