| 摘要 |
PURPOSE:To calculate a clearance, that is, a gap size between a lower side of a window and an upper side of a stage by installing a measurement rod passing through both an upper cover of a lamp chamber and a quartz ultraviolet ray transmitting window which becomes a bottom plate thereof and by measuring a stroke of the measurement rod. CONSTITUTION:Reaction gas is supplied to a surface of a treatment object 1 mounted on a stage 2 from a nozzle 10 and ultraviolet ray is irradiated from an ultraviolet ray lamp 4 for ashing treatment. In the process, a clearance, that is, a gap G between the treatment object 1 mounted on the stage 2 and a window 6 is calculated by measuring a lowering amount of the measurement rod 8 at a position wherein a lower side of a brim 8a is brought into close contact with an upper side of the stage 2 by a dial gage at an upper end part of the measurement rod 8 by pushing an upper end of the measurement rod 8 down. Since it is thereby possible to measure a gap in a usual operation state with an ultraviolet ray lamp on readily, safely, and precisely and to finish measurement in a short time, a down time of a device can be greatly reduced resulting in improvement of producibility. |
