TERMINAL FOR MEASURING CIRCUIT AND MANUFACTURE THEREOF

摘要

PURPOSE:To enable contact accurately even when pads become narrower in pitch and smaller in size and the number of the pads increases by using a needle crystal which is made to grow on an insulation surface as terminal for measure ment. CONSTITUTION:A sapphire substrate 1 has an insulating property and a needle crystal 3 of Si is made to grow on the surface thereof in an epitaxial manner as terminal 51 for measurement. The needle crystal 3 is insulated electrically from the sapphire substrate 1 and has electrical continuity to a W film 2 patterned as wire which is a plated film 4 of gold or the like provided on the needle crystal 3. The needle crystal 3, a wire pattern 2 and the like can be formed using technique such as lithography or dry etching used in a microprocessing of LSIs to allow further microprocessing remarkably. This enables sufficient adaptation even when pads become smaller in size, the number of the pads increases or the mutual pitch of the pads narrows.