发明名称 |
Method and apparatus for vaporizing materials by plasma arc discharge |
摘要 |
In order to ignite a vaporizing arc on a target which includes at least at its surface a material of a high melting point to be vaporized, and to stabilize and guide same, an electron beam gun or a laser is forseen for generating of a local vapor cloud or a premelted spot on the surface of the target in order to therewith ignite and guide the arc spot.
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申请公布号 |
US5238546(A) |
申请公布日期 |
1993.08.24 |
申请号 |
US19920935639 |
申请日期 |
1992.08.25 |
申请人 |
BALZERS AKTIENGESELLSCHAFT |
发明人 |
BERGMANN, ERICH;RUDIGIER, HELMUT |
分类号 |
C23C14/28;C23C14/30;C23C14/32 |
主分类号 |
C23C14/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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