发明名称 Method and apparatus for vaporizing materials by plasma arc discharge
摘要 In order to ignite a vaporizing arc on a target which includes at least at its surface a material of a high melting point to be vaporized, and to stabilize and guide same, an electron beam gun or a laser is forseen for generating of a local vapor cloud or a premelted spot on the surface of the target in order to therewith ignite and guide the arc spot.
申请公布号 US5238546(A) 申请公布日期 1993.08.24
申请号 US19920935639 申请日期 1992.08.25
申请人 BALZERS AKTIENGESELLSCHAFT 发明人 BERGMANN, ERICH;RUDIGIER, HELMUT
分类号 C23C14/28;C23C14/30;C23C14/32 主分类号 C23C14/28
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