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发明名称
EPITAXY REACTOR WITH AN IMPROVED GAS COLLECTOR
摘要
申请公布号
EP0366173(B1)
申请公布日期
1993.08.11
申请号
EP19890202537
申请日期
1989.10.09
申请人
LABORATOIRES D'ELECTRONIQUE PHILIPS;N.V. PHILIPS' GLOEILAMPENFABRIEKEN
发明人
FRIJLINK, PETER SOCIETE CIVILE S.P.I.D
分类号
C30B25/14;H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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