| 摘要 |
PURPOSE:To improve density strength between the polished surface of a substrate and an electrode. CONSTITUTION:After surface polishing, chemical etching and ultrasonic cleaning are performed in order, and then an electrode is formed. Cruched particles 2 which are formed after surface polishing and cause the decrease of density strength are solved by chemical etching and turned into coalescence bodies 2c, which are eliminated by the later ultrasonic cleaning. |
