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发明名称
RESIST COATING APPARATUS
摘要
申请公布号
JPH05190436(A)
申请公布日期
1993.07.30
申请号
JP19920024565
申请日期
1992.01.14
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
MATSUTAKA KOUJI;SHIGAKI KEISUKE;HAYASHIDA YASUSHI;HARADA JUNJI
分类号
B05C5/00;B05C11/08;G03F7/16;H01L21/027;H01L21/30
主分类号
B05C5/00
代理机构
代理人
主权项
地址
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