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发明名称
PATTERN INSPECTION SYSTEM
摘要
申请公布号
EP0246145(B1)
申请公布日期
1993.07.28
申请号
EP19870401052
申请日期
1987.05.07
申请人
FUJITSU LIMITED
发明人
IWATA, SATOSHI;ANDO, MORITOSHI
分类号
G01N21/956;G06T7/00
主分类号
G01N21/956
代理机构
代理人
主权项
地址
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