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发明名称
SEMICONDUCTOR PRESSURE SENSOR
摘要
申请公布号
JPH05180718(A)
申请公布日期
1993.07.23
申请号
JP19910105917
申请日期
1991.05.10
申请人
YOKOGAWA ELECTRIC CORP
发明人
AGA TOSHIO
分类号
G01L9/04;G01L9/00;H01L29/84
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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