RADIATION DETECTING ELEMENT AND ITS MANUFACTURE

摘要

PURPOSE:To obtain a radiation detector which is excellent in both X-ray sensitivity and resolution and can be increased in area at a low cost. CONSTITUTION:A photoelectric conversion layer 21 which generates photocarriers upon being irradiated with light is formed. A scintillator layer 23 composed of CsI which generates light upon receiving radiation is formed on the layer 21 with a protective film 22 in between. An infrared absorbing film 24 which has such a heat resistance that can withstand the activation temperature of the layer 23 and transmits radiation is directly formed on the layer 23. The scintillator layer 23 is activated by irradiating the infrared absorbing layer 24 with infrared rays while the photoelectric conversion layer 21 is cooled.