| 摘要 |
PURPOSE:To prevent the adhesion between the movable part and fixed part or between the movable parts of a microsensor or an actuator and prevent the generation of an operation disabled state. CONSTITUTION:A means for preventing the adhesion of a movable electrode 5 and a fixed electrode 6 is installed. In the concrete constitution, an abnormally high voltage is applied between the fixed electrode 6 and the movable electrode 5 supported by an elastic body 4, and even if the electric charge such as static electricity is charged into both the electrodes 5 and 6 from outside, no electric field is applied to an electric insulating layer 7. In other case, a means for reducing the electric field intensity (e.g. equal potential electrode 8 which is set to the equal potential to the movable electrode 5) is installed. Further, a means for reducing the contact area between the insulation film 7 and the fixed electrode 6 in the case where the movable electrode excessively shifts is installed. Accordingly, the adhesion between the movable electrode 5 and the fixed electrode 6 can be prevented, and the yield in mass production is improved, and the reliability of a microsensor or a vehicle control system using the microprocessor is improved in use. |
