| 摘要 |
<p>PURPOSE:To provide a laminated piezoelectric actuator element having a flexible insulation protective film which can trace and does not create crack even when displacement amount increases during operation. CONSTITUTION:A piezoelectric sheet 1 whose thickness is 150mum is formed by casting a slurry of piezoelectric ceramic material whose main content is PbTiO3-PbZrO3, and Ag.Pd powder mixture paste is screen-printed on that to form an internal electrode 2. Then after a hundred piezoelectric sheets are laminated in a manner internal electrodes are in the same direction, they are thermally pressurized at 120 deg.C, 200/cm<2> to form one body and then baked data around 1200 deg.C. A polythiophene film is precipitated by electrolytic polymerization at the exposed part on the side face of the internal electrode 2, at every two layers of the both facing ends of the baked body and also in a manner the insulated layers are different at both side faces, then de-doping is performed to form an insulation protective film 3. Further, a conductive silver paste is applied to form an external electrode 4, and then a lead wire 5 is attached.</p> |
