| 摘要 |
PURPOSE:To provide a ceramics heater with rapid heating possible and high power density further with high heat equality. CONSTITUTION:In a ceramics heater, foil of 30mum thickness of Fe-20Cr-5Al stainless steel is used to prepare a surface-shaped heating unit of 45X25mm size, 60OMEGA resistance by etching, and to interpose the unit by applying a 200g/cm<2> pressure to an aluminum nitride sintered material of 50mmX30mmX1mm thickness and 150W/mK heat conductivity. |
