| 发明名称 |
GUIDE RING AND CMP DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To protect a damascene wiring against erosion. SOLUTION: A W film is polished chemically and mechanically using a CMP device equipped with a guide ring 12, whose surface contains iron serving as a catalyst that accelerates the oxidation power of an oxidizing agent contained in slurry. |
| 申请公布号 |
JP2002016024(A) |
申请公布日期 |
2002.01.18 |
| 申请号 |
JP20000197235 |
申请日期 |
2000.06.29 |
| 申请人 |
TOSHIBA CORP |
发明人 |
MINAMI FUKUGAKU;MATSUI YUKITERU;FUKUSHIMA MASARU |
| 分类号 |
B24B37/00;B24B37/04;B24B37/30;B24B37/32;H01L21/304 |
主分类号 |
B24B37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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