PROCESS FOR PRODUCING A TRANSPARENT POLYMER FILM HAVING A ELECTRICAL CONDUCTIVITY

摘要

The conducting polymer film is produced by depositing the target onto the surface of polyethylene terephthalate or nylon-6 using a low temperature sputtering method at 25 deg.C at 15 x 10-2 Torr. The target comprises 100 wt. pts. of indium oxide, 5-50 wt. pts. of tin oxide and 0.1-0.3 wt. pts. of silver. The film has an excellent transparency and electric resistance, and is useful for packaging material of semiconductor, window material of clean room or antistatics for braun tube.