发明名称 WIRE BONDER
摘要 PURPOSE:To provide a wire bonder employing a capillary which can contribute to high speed fabrication of semiconductor while preventing deformation of lead frame. CONSTITUTION:The wire bonder comprises a capillary 11 for passing a wire 5 to be connected between a bonding pad on a semiconductor chip 1 and a lead frame 3, wherein the capillary 11 is provided with a port 18 for blowing out high temperature gas directly toward a bonding position.
申请公布号 JPH05160188(A) 申请公布日期 1993.06.25
申请号 JP19910320486 申请日期 1991.12.04
申请人 FUJITSU MIYAGI ELECTRON:KK 发明人 KOBAYASHI KENJI;ASANO YUICHI;TAKAHASHI FUMIHITO;KOBAYASHI HITOSHI;OKUYAMA SHIGENORI
分类号 H01L21/60 主分类号 H01L21/60
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