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经营范围
发明名称
SPIN ETCHER
摘要
申请公布号
JPH05160106(A)
申请公布日期
1993.06.25
申请号
JP19910037438
申请日期
1991.03.04
申请人
RYODEN SEMICONDUCTOR SYST ENG KK;MITSUBISHI ELECTRIC CORP
发明人
YAMAMOTO KAZUHIKO
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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