METHOD FOR TESTING SEMICONDUCTOR STRUCTURES,申请号SU19904861331-传众专利搜索

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发明名称	METHOD FOR TESTING SEMICONDUCTOR STRUCTURES
摘要
申请公布号	RU1823036(C)	申请公布日期	1993.06.23
申请号	SU19904861331	申请日期	1990.07.10
申请人	INSTITUT ELEKTRONIKI AN BSSR	发明人	BOCHAROVA IRINA A;RYZHKOV MIKHAIL P
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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