发明名称 |
THERMALLY ZONED SUBSTRATE HOLDER ASSEMBLY |
摘要 |
A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).
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申请公布号 |
US2008092818(A1) |
申请公布日期 |
2008.04.24 |
申请号 |
US20070961355 |
申请日期 |
2007.12.20 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
FINK STEVEN T.;STRANG ERIC J. |
分类号 |
C23C16/46;C23C16/00;H01L21/00 |
主分类号 |
C23C16/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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