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发明名称
摘要
申请公布号
DE3921844(C2)
申请公布日期
1993.06.09
申请号
DE19893921844
申请日期
1989.07.03
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
ISHIDA, TOMOAKI;FUJIWARA, NOBUO;NISHIOKA, KYUSAKU;AKAZAWA, MORIAKI;SHIBANO, TERUO;KAWAI, KENJI, ITAMI, HYOGO, JP
分类号
H01L21/302;H01J37/32;H01L21/205;H01L21/3065;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
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