发明名称 |
Method of making polymer thin films for optical uses |
摘要 |
A method is disclosed for the deposition of plasma films in which the optical index of refraction of the deposited film can be varied continuously or discontinuously as the material is deposited. The change in refractive index is accomplished by changing the input power applied to the plasma chamber. The method can be used to create optical wave guides from material of a single input monomer vapor.
|
申请公布号 |
US5217749(A) |
申请公布日期 |
1993.06.08 |
申请号 |
US19910765077 |
申请日期 |
1991.09.24 |
申请人 |
WISCONSIN ALUMNI RESEARCH FOUNDATION |
发明人 |
DENTON, DENICE D.;TOBIN, JEFFREY A. |
分类号 |
B05D7/24;G02B6/122 |
主分类号 |
B05D7/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|