| 发明名称 |
Laser rounding a sharp semiconductor projection |
| 摘要 |
A method of rounding a sharp semiconductor projection jutting out from a principal body of semiconductor material comprises the step of irradiating the projection with a laser pulse having an energy density of less than about 1.5 joules/cm2.
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| 申请公布号 |
US4249960(A) |
申请公布日期 |
1981.02.10 |
| 申请号 |
US19790049597 |
申请日期 |
1979.06.18 |
| 申请人 |
RCA CORP |
发明人 |
SCHNABLE, GEORGE L;WU, CHUNG P |
| 分类号 |
H01L21/268;H01L21/86;(IPC1-7):H01L21/26;H01L21/26 |
主分类号 |
H01L21/268 |
| 代理机构 |
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代理人 |
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| 主权项 |
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