VERWENDUNG VON IN ALKALISCHE MILIEU LOESLICHEN SILSESQUIOXANPOLYMEREN IN EINEM RESIST ZUR HERSTELLUNG VON ELECTRONISCHEN TEILEN.,申请号DE19863687479T-传众专利搜索

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发明名称	VERWENDUNG VON IN ALKALISCHE MILIEU LOESLICHEN SILSESQUIOXANPOLYMEREN IN EINEM RESIST ZUR HERSTELLUNG VON ELECTRONISCHEN TEILEN.
摘要
申请公布号	DE3687479(T2)	申请公布日期	1993.06.03
申请号	DE19863687479T	申请日期	1986.05.07
申请人	HITACHI, LTD., TOKIO/TOKYO, JP	发明人	SUGIYAMA, HISASHI;NATE, KAZUO;INOUE, TAKASHI, TOTSUKA-KU YOKOHAMA-SHI, JP;MIZUSHIMA, AKIKO, YOKOHAMA-SHI KANAGAWA-KEN, JP
分类号	C08G77/14;C08G77/60;G03F7/075;(IPC1-7):C08G77/14;G03F7/004	主分类号	C08G77/14
代理机构		代理人
主权项
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