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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05129219(A)
申请公布日期
1993.05.25
申请号
JP19910291687
申请日期
1991.11.07
申请人
FUJITSU LTD
发明人
KIMURA MASAMI
分类号
H01L21/205;H01L21/28;H01L21/314;H01L21/3205;H01L21/322;H01L23/52
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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Förankringsanordning
