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经营范围
发明名称
WAFER CLEANING EQUIPMENT
摘要
申请公布号
JPH05129268(A)
申请公布日期
1993.05.25
申请号
JP19910285238
申请日期
1991.10.31
申请人
FUJI ELECTRIC CO LTD
发明人
FUJII HIROSHI
分类号
H01L21/304;H01L21/677;H01L21/68
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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